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Keywords magnetron sputtering;multilayered gradient film;hardness; 磁控溅射;多层梯度薄膜;硬度;
Keywords Magnetron sputtering;Magnesium alloys;Surface treatment; 磁控溅射;镁合金;表面处理;
Keywords Magnetron sputtering;Coating;Turbine parts; 磁控溅射;涂层;涡轮部件;
Keywords magnetron sputtering;metal film;particles;cenosphere;carborundum; 磁控溅射;金属膜;微颗粒;空心微珠;碳化硅;
Keywords magnetron sputtering;Si nanocrystal;photoluminescence;metal induced; 磁控溅射;纳米晶硅;光致发光;金属诱导;
Keywords magnetron sputtering;silver film;multiple anti-tarnish process;accelerate tarnishing test; 关键词磁控溅射;银膜;复合防变色工艺;变色加速试验;
Keywords magnetron sputtering;silver film;anti-tarnishing;accelerated tarnishing test; 关键词磁控溅射;银膜;抗变色;变色加速试验;
Keywords magnetron sputtering;optical fiber sensor;giant magnetostrictive thin film;Mach-Zehnder interferometer; 关键词磁控溅射;光纤传感器;超磁致伸缩薄膜;马赫-曾德尔干涉仪;
Keywords magnetron sputtering;low pressure chemical vapor deposition（LPCVD）;poly silicon thin film;gauge coefficient;piezoresistive characteristic; 磁控溅射;低压化学气相淀积;多晶硅薄膜;应变系数;压阻特性;
Si rich SiO2 films have been prepared by a rf magnetron sputter method. 用射频磁控溅射法制备了富硅二氧化硅薄膜。
Study of Silicon Oxynitride Film Deposited by RF Magnetron Sputtering[J]. 引用该论文朱勇;顾培夫;沈伟东;邹桐.
Boron carbon nitride(BCN) thin films were deposited by radio frequency(RF) magnetron sputtering. 采用射频磁控溅射技术制备出硼碳氮(BCN)薄膜。
Helium-charged Al films are prepared by direct current (DC) magnetron sputtering with a He/Ar mixture. 摘要采用氦氩混合气氛下直流磁控溅射沉积方法制备含有氦原子的金属铝膜。
High quality nickel films have been successfully plated on cenosphere particles by dc magnetron sputtering at mom temperature. 摘要本文论述了在空心微珠表面磁控溅射镀金属薄膜的方法。
TiB_2 and Ti-B-N coatings were prepared by magnetron sputtering on 1Cr18Ni9Ti stainless steel. 用磁控溅射法在1Cr18Ni9Ti不锈钢上沉积了TiB2和Ti-B-N涂层。
A new type closed field-unbalanced magnetron sputtering technology for optical coatings is described. 介绍了一种制备高质量光学薄膜的新型闭磁场磁控溅射技术。
Thin film manganin gages and ytterbium gages were fabricated by magnetron sputtering. 采用磁控溅射法制备锰铜薄膜,溅射和真空蒸发法制备镱薄膜。
This system can be used either as multi-arc or magnetron sputtering PVD individually. 也可以单独作为磁控溅射或多弧离子镀膜机使用。
AlN films with special function and excellent structure can be grown under proper conditions by magnetron sputtering. 采用磁控溅射技术,可以选用在适当的条件下制备具有特定功能与结构优良的氮化铝薄膜。
Aluminum film was grown on modified fluorinated polymer composite films by rf magnetron sputtering. 摘要采用射频磁控溅射技术在改性氟塑料表面沉积铝层，制备了金属/氟化高聚物复合薄膜。